2

Miniature X-Ray Sources

Year:
2017
Language:
english
File:
PDF, 2.03 MB
english, 2017
5

Structural and electrical properties of Ti-Al thin films

Year:
1979
Language:
english
File:
PDF, 269 KB
english, 1979
6

Silicon optical pressure sensor

Year:
1992
Language:
english
File:
PDF, 700 KB
english, 1992
10

Miniature and MEMS-type vacuum sensors and pumps

Year:
2009
Language:
english
File:
PDF, 721 KB
english, 2009
18

Electron field emission from microtip arrays

Year:
2008
Language:
english
File:
PDF, 647 KB
english, 2008
19

Field-emission electron source for vacuum micropump

Year:
2011
Language:
english
File:
PDF, 606 KB
english, 2011
23

Glow-discharge ion-sorption micropump for vacuum MEMS

Year:
2014
Language:
english
File:
PDF, 1.91 MB
english, 2014
24

Generation and Control of Vacuum Inside Miniature Devices

Year:
2012
Language:
english
File:
PDF, 489 KB
english, 2012
42

Desorption/ionization mass spectrometry on array of silicon microtips

Year:
2005
Language:
english
File:
PDF, 1.27 MB
english, 2005
43

Mold-type SiC field emitters with heavily boron-doped gates

Year:
2004
Language:
english
File:
PDF, 669 KB
english, 2004
48

Vacuum microdevices

Year:
2012
Language:
english
File:
PDF, 1.31 MB
english, 2012
50

MEMS type ionization vacuum sensor

Year:
2016
Language:
english
File:
PDF, 3.23 MB
english, 2016